Ultra High Precision Thermal Expansion Measurement System by Laser Interferometer
SuperLIX
The world of expansion with accuracy of 1×10-8/K or less
Thermal expansion measurement with the world-class ultra high accuracy ＊as a commercial measurement system
Application case
- Development of zero-expansion materials
- Development of negative thermal expansion material and anode materials
- Development of standard materials
- Development of materials for actuator
Applications
- High-precision dilatometry of materials with extremely low expansion rate such as 10-8/K (glasses, ceramics, metal, etc.)
・ Spare parts of lithography system for semiconductor production
・ Spare parts of precision stage
・ Materials requiring high accuracy such as for aerospace industries
・ Materials for highly precise photogram substrate - Quality control of low expansion materials
Features
- By incorporating a elimination mechanism within the system, the impact of the vibration disturbance can be prevented, and the typical analytical electronic balance (resolution 0.01 mg) can be used in a stable environment. (patent application: 2016-058190, 058191, and 058192)
- Measure the displacement of a sample based on the laser wavelength (632.8nm). Stray light can be eliminated by integrating optical elements, improving the signal-to-noise ratio of fringe signals. No measurement or operation is required for special displacement calibration.
- The interference fringes are detected by the image sensor and imageprocessed to calculate the displacement (expansion/contraction) at a high resolution (1nm) even during sample measurement. And the expansion rate can be checked.
Specifications
| Model | SuperLIX-R |
|---|---|
| Temperature range | Standard type 5～50℃ (highly accurate water circulation system used) |
| Sample size | φ5 or □5±0.5 x L12～20(mm) (standard sample sizeφ5xL20(mm), end-face finishing with R-shape) |
| Atmosphere | Reduced pressure He atmosphere |
| Measurement method | Dual path Michelson laser interferometry |
Utility
| Space requirement | Approx. W1200 xD760 x H1600(mm) *2500mm(H) or more space is required for removing a chamber. |
|---|---|
| Power | PC(monitor, desktop): AC100V 15A(plug and earth cable included), two locations Exhaust system: AC200V three phase 15A one location Gas feeding system: AC100V single phase 15A one location Water circulation system: AC100V 15A(plug and earth cable included) one location |
| Grounding | D type (ground resistance 100Ω or below) one location |
Measurement Example
Patents and standards
Compliant with JIS R3251-1990
Special Features 2016-058190, 058191, and 058192
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