Temperature-Programmed Desorption Gas Analyzer
TDS-M202R

Reach a target temperature for a short time, Mass analysis of up to 200amu is available
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.

Applications

Evaluation of various vacuum materials like vacuum grease and O-rings
Evaluation of semiconductor wafers and chips
Analysis of small amount of gas desorbed from alloy and ceramics etc.

Features

Capable of mass analysis measurement in a high vacuum of 10^-5Pa range
A wide range of heating setting from high speed to low speed, multistep heating and cyclic heating are available
With a quartz reaction tube employing cold wall method, there is almost no gas emitted by infrared lamp heating.
method, there is almost no gas emitted by infrared lamp heating.

Specifications

Temperature range	RT ～ 1000 °C
Sample size	□20 × t2 (mm)
Atmosphere	Vacuum
Heating method	Paraboloidal reflected infrared tubular heating method
Temperature sensor	Thermocouple (JIS “K”)
Ultimate vacuum	The range of 10^-5 Pa (after 8-hour baking)
Measurement range of mass amount	1 ～ 200 amu
Safe guard	Cooling water • Earth leakage(ELB)
Sensitivity	4A/Pa
Resolution	M/ Δ M=1M (10% P.H.)

Analysis service by using this product

thermal desorption analysis

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Temperature-Programmed Desorption Gas Analyzer TDS-M202R