Semiconductor Product list

It is possible to make precise temperature control in addition to clean and rapid heating and cooling with an infrared lamp heating furnace.
In addition, it is also possible to handle special gases in the chamber, such as inert gas, NH3 and hydrogen, and offer a lineup that matches a variety of needs, from small-piece sizes to large-diameters, and automatic heat treatment with robot transfer.
We can cover a series of processes from basic research to mass production and quality inspection.
Also, we can offer the suitable system for high-speed heating/cooling of diamond semiconductors for SiC・GaN and next-generation semiconductors, diffusion-annealing after ion-implantation, electrode-resistance reduction, and annealing for oxide/nitride formation.