Mini Lamp Annealer
MILA-5050

This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.
MILA-5000 series, the current models which are available for up to 20mm square size samples, have been velued by many customers since their release. But in response to increased number of demands from customers that they want to heat bigger samples, this new system, available for heat treatment of up to 50mm square size samples has been developed with still having a compact body in which heating furnace, chamber and temperature controller are all integrated.

Applications

Rapid thermal annealing of Si wafer and compound wafer
Rapid thermal annealing of electronics material like substrates of optical CVD
Heat treatment of glass substrates, ceramics and compound materials etc
Thermal cycle test
Thermal annealing of metal materials
Heat resistance evaluation of coating films
Heating and drying of organic materials and resins

Features

Heat treatment up to the maximum 50 mm square size samples
Maximum operating temperature 1200°C
Desktop type in which heating furnace, chamber and temperature controller are all integrated
Rapid heating/cooling and clean heaing with cold wall structures
Simple input of temperature recipe into computer connected with USB
Display temperature data on the PC monitor during heating

Specifications

Temperature Range	RT ～ 1200 °C
Heating rate	50 °C/s
Sample Size	□ 50 or φ 50 × t 2 (mm)
Atmosphere	Vacuum, Gas flow
Process pressure	10Pa or more ~ atmospheric pressure

*Vacuum pumping system is optional. * Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.

Measurement data

① 500℃,Δt = 3.2℃
② 800℃,Δt = 0.6℃
③ 1000℃,Δt = 4.2℃
④ 1200℃,Δt = 2.6℃

Sample assembly (when measuring 2-inch sample)

SiC coat carbon susceptor and quartz sample holder are optional parts (above).

Utility

Power source	AC200V, 5kW
Cooling water	City water, flow rate 6L/min water pressure 0.3MPa or more
System size	450(W) x 492(D) x 219(H) mm without protrusion
Weight	approx. 24kg

Option

SiC coat carbon susceptor
Vacuum exhaust system (RP, DRY etc.)
Gas flow unit (rotameter)
Flow switch for cooling water
Check valve (relief valve)
Power cable, Cooling water hose
Cooling water circulator
Handy spot welder (HS-9000)
Handy arc welder (HA-1H)