This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.
Applications
- Evaluation of various vacuum materials like vacuum grease and O-rings
- Evaluation of semiconductor wafers and chips
- Analysis of small amount of gas desorbed from alloy and ceramics etc.
Features
- Capable of mass analysis measurement in a high vacuum of 10-5Pa range
- A wide range of heating setting from high speed to low speed, multistep heating and cyclic heating are available
- With a quartz reaction tube employing cold wall method, there is almost no gas emitted by infrared lamp heating.
- method, there is almost no gas emitted by infrared lamp heating.
Specifications
| Temperature range | RT ～ 1000 °C |
|---|---|
| Sample size | □20 × t2 (mm) |
| Atmosphere | Vacuum |
| Heating method | Paraboloidal reflected infrared tubular heating method |
| Temperature sensor | Thermocouple (JIS “K”) |
| Ultimate vacuum | The range of 10-5 Pa (after 8-hour baking) |
| Measurement range of mass amount | 1 ～ 200 amu |
| Safe guard | Cooling water • Earth leakage(ELB) |
| Sensitivity | 4A/Pa |
| Resolution | M/ Δ M=1M (10% P.H.) |
