High Temperature Rapid Thermal Annealing System
HT-RTA59HD
Heating a small piece of sample up to 1800°C just in 10 seconds.
HT-RTA59HD is a desktop-type lamp annealing system which enables a small piece of sample to heat up to 1800°C (Ultrahigh temperature zone) just in 10 seconds with high reflection efficiency by spot focused heating.
Applications
- SiC (Power device) oxide film formation to activation
- Heat treatment furnace for high-melting point material
- Sintering and baking furnace
- Local heating impact test furnace
- Crystal growth test furnace (Zone melting)
Features
- Capable of heating a small piece of sample (□ 15 mm) up to 1800°C (Ultra-high temperature zone) just in 10 seconds.
- High reflection efficiency with high-power spot focused heating
- Desktop-type compact design
- Infrared lamp heating method enables clean-heating to minimize dust and gas generation
- It is available to easily input outer signal or temperature program setting from your PC and display the temperature data during heating on the monitor.
Specifications
| Temperature range | RT ～ 1800 °C |
|---|---|
| Sample dimension | □15 × t1 (mm) |
| Heating atmosphere | Various gas flow |
| Thermocouple | JIS B φ 0.3 (W-Re is available) |
System diagram
- ❶ For lamp cooling Air GAS INLET
- ❷ GAS OUTLET
- ❸ N2 GAS INLET
- ❹ Ar GAS INLET
- ❺ Lamp
- ❻ Transparent quartz protective tube
- ❻ Transparent quartz protective tube
- ❽ Slider to move the sample into/out of the furnace (Manual operation)
Heating property
Maximum achieving temperature
The power supply : 7kW (max.)Measurement : W-Re thermocouple
Heating atmosphere : N2 1L/min
Attainment Temperature : 2157℃ (Approx 200℃/sec heating up to 2000℃)
Rapid heating control
Temperature recipe : 200℃/s holding time 5 min.Heating atmosphere : N2 100cc/mm
Sample holder : High purity carbon
Sample Susceptor : High purity carbon
Sample holder and susceptor
Utility
| Power requirements | AC 200V, single phase 8kW |
|---|---|
| Cooling water | 0.3MPa Approx 5L/min |
| Lamp cooling gas | Dry air Approx 200L/min |
| Outside dimensions (mm) | Approx W410 x D450 x H840 (excluding protrusion) |
| Weight | Approx 45kg |
Option
- Vacuum exhaust system (RP, DRY, TMP etc.)
- Gas piping system (From 2nd system)
- Cooling water circulator
- Cooling air generator system
- Handy spot welder (HS-9000)
- Handy arc welder (HA-1H)
Analysis service by using this product
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